Nanotechnology and Microsystems Engineering
AS
Sergey E. Alexandrov
Head of the Lab

Our Research

Our team has carried out research into plasma etching and deposition of functional layers, synthesis of functional nanomaterials and nanostructures for microelectronics, optical industry, photonics, medicine, and environmental science. The laboratory is equipped with extensive, state-of-the-art equipment, it is possible to conduct research aimed at analysis of the chemical composition, surface structure and morphology, laying the groundwork for solving complex technological problems
Synthesis and characterization of nanopowder materials
  • Obtaining dispersed nanopowders of metals, alloys and chemical compounds based on them by gas-phase synthesis
  • Developing methods for surface functionalization, introduction and homogeneous distribution of dispersed nanofillers into polymer and metal matrices
  • Synthesis of carbon nanostructures including directional growth from the gas phase on different surfaces of nanotubes/nanofibers/graphene
  • Synthesis of carbon nanostructures on the surface of micron-sized metallic or metal-containing powder materials for obtaining metal-matrix nanocomposites with enhanced tribomechanical and electrical properties
  • Applying standard and innovative methods for controlling the composition and structure of nanodispersed and nanocomposite materials and coatings
Metal-matrix nanocomposites
  • Obtaining metal-matrix nanocomposite powder materials
  • Processing nanocomposite and nanostructured materials; obtaining products by methods of powder metallurgy
Metastable and non-equilibrium metallic materials
  • Relaxation and crystallization processes in amorphous metal alloys, bulk metal glasses, multicomponent glass-forming systems
  • Gas-thermal methods for obtaining coatings with a non-equilibrium structure
  • Effects of phase transformations in metals and alloys on the macroscopic properties of materials (shape-memory alloys, damping materials, amorphous crystalline materials)
Polymer and hybrid structural composites
  • Developing structural composites based on thermoplastic binders and basalt/glass/carbon fibers and fabrics, in particular, using nanodispersed additives
  • Development and design of laboratory and industrial equipment for obtaining metal-matrix, hybrid and polymer nanocomposites with the given physical and mechanical characteristics
  • Studies on the tribotechnical properties of nanodispersed particles in composite materials, simulation of conditions for using solid lubricants, additives to oils

Lab Staff

Sergey E. Aleksandrov
Scopus ID Researcher ID
TD
Dmitriy K. Tagantsev
Scopus ID ORCID Researcher ID Research Gate
Elena V. Afanasyeva
Scopus ID Research Gate
OA
Artem A. Osipov
Scopus ID ORCID Researcher ID Research Gate
TI
Irina A. Tyurikova
Scopus ID Researcher ID Research Gate
TK
Kirill S. Tyurikov
Scopus ID Researcher ID Research Gate
EE
Ekaterina V. Endiiarova
Scopus ID Research Gate
SA
Anastasia B. Speshilova
Scopus ID Researcher ID
Alexander L. Shakhmin
Scopus ID ORCID
MM
Mikhail D. Mikhailov
Scopus ID ORCID Researcher ID Research Gate
BP
Polina G. Bespalova
Scopus ID ORCID Researcher ID Research Gate
RI
Ilya Reshetov
Scopus ID ORCID Researcher ID Research Gate

Selected Publications

Treatment of textile in a low-temperature gas-discharge plasma
Endiiarova E. V., Eritsyan G. S.
2020
Pub link
Optimization of the geometry of the reactor inductance coil for reactive-ion etching by modeling in the COMSOL Multiphysics software package
Endiiarova E. V., Eritsyan G. S.
2020
Pub link
Concentration series of Sm3+-doped YVO4 nanoparticles: Structural, luminescence and thermal properties
Kolesnikov, I. E., Golyeva, E. V., Kurochkin, M. A., Kolesnikov, E. Y., & Lähderanta, E.
2020
Pub link
Monocrystalline quartz ICP etching: road to high-temperature dry etching
Osipov A. A., Iankevich G. A., Alexandrov S. E.
2020
Open access
Dry etching of silicon carbide in ICP with high anisotropy and etching rate
Osipov A. A. et al.
2020
Open access
Formation of Au Nanoparticles and Features of Etching of a Si Substrate under Irradiation with Atomic and Molecular Ions
Tuzhilkin M. S. et al.
2020
Open access
Fast and Controllable Synthesis of Core–Shell Fe3O4–C Nanoparticles by Aerosol CVD
Tyurikova I. A. et al.
2020
Open access
ICP etching of SiC with low surface roughness
Osipov A. A. et al.
2020
Pub link
Influence of operation parameters on BOSCH-process technological characteristics
Osipov A. A. et al.
2020
Pub link
Nd3+ concentration effect on luminescent properties of MgAl2O4 nanopowders synthesized by modified Pechini method
Golyeva E. V. et al.
2020
Pub link
Luminescent properties of YVO4: Eu3+ ceramic phosphors according to Li+ content
Golyeva E. V. et al.
2020
Pub link
Etching of SiC in low power inductively-coupled plasma
Osipov A. A. et al.
2019
Open access
Study of the effect of substrate holder temperature on the etching rate of monocrystalline silicon carbide
Osipov A.
2019
Open access
FTIR and Raman spectroscopy studies of ZnO-doped BaO⋅ 2B2O3 glass matrix
Osipov A. A. et al.
2019
Pub link
Study of Formation Conditions and Characteristics of Carbon-containing Particles Produced from ortho-Xylene by Aerosol-Assisted Chemical Vapor Deposition
Tyurikova I. A. et al.
2019
Open access
Nanocomposite antifriction molybdenum disulfide (filler)–silicon oxide (matrix) coatings. IOP Conference Series: Earth and Environmental Science
Alexandrov S. et al.
2019
Open access
Aerosol-Assisted Chemical Deposition of Nanocomposite Material in the" Iron-Carbon-Oxygen" System
Tyurikova I. et al.
2019
Pub link
Substrate modification influence on properties of nanocomposite based on TiO2 and gold nanoparticles
Mishin M. V. et al.
2019
Open access
Electrochromic Properties of NiO Thin Coatings
Kondrateva A. S. et al.
2019
Pub link
Degradation of NiO-GNPs Electrochromic Coating
Bespalova P. et al.
2019
Pub link
Calculating the Nominal Values of the Matching Device Installation of Plasma Chemical Etching. Key Engineering Materials
Endiiarova E. V., Ruby S.
2019
Pub link
Structural, luminescence and thermometric properties of nanocrystalline YVO4:Dy 3+ temperature and concentration series
Kolesnikov, I.E., Kalinichev, A.A., Kurochkin, M.A., Golyeva, E.V., Terentyeva, A.S., Kolesnikov, E.Y., Lähderanta, E.
2019
Open access
Near-infrared emitting YVO4:Nd3+ nanoparticles for high sensitive fluorescence thermometry
10.1016/j.jlumin.2017.11.024
Kalinichev, A.A., Kurochkin, M.A., Golyeva, E.V., Kurochkin, A.V., Lähderanta, E., Mikhailov, M.D., Kolesnikov, I.E.
2018
Pub link
The mechanism of charge carrier generation at the TiO2—n-si heterojunction activated by gold nanoparticles
Mishin M. V. et al.
2018
Open access
Effect of synthesis conditions on structural, morphological and luminescence properties of MgAl2O4:Eu3+ nanopowders
10.1016/j.jlumin.2017.11.068
Golyeva, E.V., Kolesnikov, I.E., Lähderanta, E., Kurochkin, A.V., Mikhailov, M.D.
2018
Pub link
Effect of Aerosol-Assisted Chemical Vapor Deposition Parameters on Characteristics of the Resulting Carbon-containing Particles
Tyurikova I. A., Aleksandrov S. E., Shakhmin A. L.
2018
Open access
Antifriction properties of plasma-chemical coatings based on SiO 2 with MoS 2 nanoparticles under conditions of spinning friction on ShKh15 steel
Breki A. D. et al.
2018
Open access
In-situ laser-induced synthesis of associated YVO4:Eu3+SiO2Au-Ag/C nanohybrids with enhanced luminescence
10.1016/j.jssc.2017.12.021
Kolesnikov, I.E., lvanova, T.Y., Ivanov, D.A., Kireev, A.A., Mamonova, D.V., Golyeva, E.V., Mikhailov, M.D., Manshina, A.A.
2018
Pub link
Development of Process for Fast Plasma-Chemical Through Etching of Single-Crystal Quartz in SF 6/O 2 Gas Mixture
Osipov A. A., Aleksandrov S. E., Berezenko V. I.
2018
Open access
YVO4:Nd3+ nanophosphors as NIR-to-NIR thermal sensors in wide temperature range
10.1038/s41598-017-18295-w
Kolesnikov, I.E., Kalinichev, A.A., Kurochkin, M.A., Golyeva, E.V., Kolesnikov, E.Y., Kurochkin, A.V., Lähderanta, E., Mikhailov, M.D.
2017
Open access
Low‐Temperature Atmospheric Pressure Plasma‐Enhanced CVD of Nanocomposite Coatings “Molybdenum Disulfide (Filler)–Silicon Oxide (Matrix)”
Alexandrov S. E. et al.
2017
Open access
Low-temperature plasma-chemical deposition of nanocomposite antifriction molybdenum disulfide (filler)–silicon oxide (matrix) coatings
Alexandrov S. E., Tyurikov K. S., Breki A. D.
2017
Open access
Plasma-etching of 2D-poled glasses: A route to dry lithography
Alexandrov S. E. et al.
2017
Open access
Gas-sensitive properties of thin nickel oxide films
Kondrateva A. S. et al.
2017
Open access
Nd3+ single doped YVO4 nanoparticles for sub-tissue heating and thermal sensing in the second biological window
10.1016/j.snb.2016.12.005
Kolesnikov, I.E., Golyeva, E.V., Kalinichev, A.A., Kurochkin, M.A., Lähderanta, E., Mikhailov, M.D.
2017
Pub link
Synthesis of water-based Fe3O4 magnetic nanoparticles, stabilized by oleic acid and mannitol
Tyurikova I. A., Demidov A. I.
2017
Open access
Methods and technique of manufacturing silica graded-index fibers with a large central defect of the refractive index profile for fiber-optic sensors based on few-mode effects
10.1117/12.2270784
Demidov, V.V., Ter-Nersesyants, E.V., Bourdine, A.V., Burdin, V.A., Minaeva, A.Y., Matrosova, A.S., Khokhlov, A.V., Komarov, A.V., Ustinov, S.V., Golyeva, E.V., Dukelskii, K.V.
2017
Open access
Nanopowders of aluminum-magnesium spinel doped with europium(3+) ions: Synthesis by hydroxocarbonates coprecipitation and study of their physicochemical properties
10.1134/S1070363216120318
Golyeva, E.V., Kolesnikov, I.E., Mikhailov, M.D., Sokolov, I.A., Man’shina, A.A.
2016
Open access
Ratiometric thermal sensing based on Eu3+-doped YVO4 nanoparticles
10.1007/s11051-016-3675-8
Kolesnikov, I.E., Golyeva, E.V., Lähderanta, E., Kurochkin, A.V., Mikhailov, M.D.
2016
Open access
Nd3+-doped YVO4 nanoparticles for luminescence nanothermometry in the first and second biological windows
10.1016/j.snb.2016.05.095
Kolesnikov, I.E., Golyeva, E.V., Kurochkin, M.A., Lähderanta, E., Mikhailov, M.D.
2016
Pub link
How the synthesis conditions and structure of the starting nanocrystalline powders affect the optical properties of transparent ceramic MgAl2O4
10.1364/JOT.83.000127
Gol'eva, E.V., Mikhaǐlov, M.D., Dunaev, A.A., Ignatenkov, B.A.
2016
Pub link
Structural and luminescence properties of MgAl2O4:Eu3+ nanopowders
10.1016/j.jallcom.2015.09.122
Kolesnikov, I.E., Golyeva, E.V., Kurochkin, A.V., Mikhailov, M.D.
2016
Pub link
Optimization of technological parameters in plasma chemical etching of quartz single crystals
Osipov A. A., Alexandrov S. E., Osipov A. A.
2016
Open access
The effect of a lithium niobate heating on the etching rate in SF6 ICP plasma
Osipov A. A., Alexandrov S. E., Iankevich G. A.
2016
Open access
Synthesis of molybdenum disulfide particles by aerosol-assisted chemical vapor deposition
Aleksandrov S. E., Filatov K. D., Tyurikov K. S.
2016
Open access
Effect of aerosol chemical vapor deposition on characteristics of MoS 2 particles
Aleksandrov S. E. et al.
2016
Open access
Control over structural-dimensional characteristics of tungsten disulfide particles in aerosol-assisted chemical vapor deposition
Alexandrov S. E. et al.
2016
Open access
Plasma chemical etching of photoresist layers based on diazonaphthoquinones in an installation with remote oxygen plasma
Speshilova A. B., Solov’ev Y. V., Alexandrov S. E.
2016
Open access

Postgraduate courses

  • Technology and equipment for the production of semiconductors, materials and electronic devices

Grants

  • Modernization of plasma-chemical etching unit Era-3 and testing the deep etching modes of silicon carbide (Microelectronics (Development of technologies for creating electronic components for specialized and civil purposes))
  • Creation of interactive training and research system operating in remote access for simulation of gas-phase synthesis of nanoscale structures and nanomaterials in a problem-oriented high-performance computing environment
  • Ultrafine materials based on rhenium (synthesis of precursors, properties and applications of materials)
  • Development of technology for plasma-chemical deposition of hydrophobic coatings on textile materials.
  • Development of ultra-high-frequency (microwave) technology and equipment for microwave synthesis of oxide nanomaterials with subsequent fabrication of products from these materials
    • Development of a program for professional retraining and a training system on construction and production of vacuum devices
    • Production of non-porous coatings by chemical vapor deposition from low-friction nanocomposite materials consisting of a wear-resistant matrix and molybdenum disulfide (tungsten) nanoparticles.
    • Research and development of novel nanoscale up-conversion phosphors for use in optical bioimaging systems
    • New principles for production of nanocomposites and nanoporous materials using reactive diffusion upon ion exchange in glasses
    • Ultra-high electric field nanostructuring